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Department of Chemical Engineering, Stanford University

Bent Research Group

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The research in our group is focused on understanding and controlling surface and interfacial chemistry and applying this knowledge to a range of problems in semiconductor processing, micro- and nanoelectronics, nanotechnology, and sustainable and renewable energy. More detail can be found on our research page.

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Latest News


The AVS ALD 2018 Conference took place in Incheon, South Korea.

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July 30, 2018


Congratulations, Stacey, Dara, and Tzu-Ling!

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June 11, 2018


Welcome, Nathan!

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June 6, 2018