Stacey F. Bent is the Jagdeep and Roshni Singh Professor at Stanford University, where she is Professor of Chemical Engineering, Professor of Energy Science and Engineering, and Professor, by courtesy, of Chemistry, of Materials Science and Engineering, and of Electrical Engineering. She served as Vice Provost for Graduate Education and Postdoctoral Affairs at Stanford from 2019-2025. Bent obtained her B.S. degree in chemical engineering from UC Berkeley and her Ph.D. degree in chemistry from Stanford, and she was a postdoctoral fellow at AT&T Bell Laboratories. She was an assistant professor at New York University before moving to Stanford University. Bent's research interests are in the understanding of surface chemistry and materials synthesis and the application of this knowledge to a variety of problems in semiconductor processing, sustainable energy, and nanotechnology. Her group's research on atomic layer deposition (ALD) ranges from fundamental mechanistic studies, to area selective ALD, to applications in extreme ultraviolet lithography, 2D electronics, and batteries. Bent has supervised 60 Ph.D. students and 30 postdoctoral scholars. She was elected to the U.S. National Academy of Engineering in 2020.

Stacey Bent is also a Senior Fellow in the Precourt Institute for Energy and is an Affiliated Faculty Member of the Woods Institute for the Environment. She served as the Director of the TomKat Center for Sustainable Energy for 10 years and is the former co-Director of the Center on Nanostructuring for Efficient Energy Converstion (CNEEC), a DOE Energy Frontier Research Center.

She has also written an autobiographical chapter about her life and work in the book Mom the Chemistry Professor, published in 2018. The chapter can be found through Springer, and Stanford affiliates can access it through Stanford Libraries.

Awards

Dourdeville Memorial Lectureship on Engineering in Service to Society, Brown University (2025); Stanford-Samsung Research Initiative Faculty Award (2022); Braskem Award for Excellence in Materials Engineering and Science (AIChE) (2021); ALD (Atomic Layer Deposition) Innovator Award (2021); Dorn Lecturer, Northwestern University (2021); Racheff Award Lecturer, University of Illinois (2021); SRC Technical Excellence Award (2020); National Academy of Engineering (2020); ACS Award in Surface Chemistry (2018); Morino Lecturer (2017); Reilly Lectureship, University of Notre Dame (2016); Bert and Candace Forbes University Fellow in Undergraduate Education (2013); Fellow of the American Chemical Society (2013); Stanford Medal for Faculty Excellence Fostering Undergraduate Research (2013); Jagdeep and Roshni Singh Chair (2012); Fellow of the World Technology Network (2011); AVS Fellow (2006); Tau Beta Pi Award for Excellence in Undergraduate Teaching (2006); H. Willard Davis Lecturer, University of South Carolina (2004); Coblenz Award for Molecular Spectroscopy (2001); Frederick E. Terman Faculty Fellow (1998); Peter Mark Memorial Award from AVS (2000); Camille Dreyfus Teacher-Scholar (1998); Research Corporation Cottrell Scholar (1998); Beckman Young Investigator Award (1997); National Science Foundation CAREER Award (1995).